X-Y STAGE

Pattern generator Aperture

(At Photo-graphic Plate)

Laser Resolution:

Lamda/128

0.005 µm

(with digital servo)

Minimum Programmable Stage Increments:

0.001 µm

(with digital servo)

Travel:

152 mm x 203 mm standard

(6" x 8")

Precision:

(Repeatability over full stage travel)

0.2 µm at 3 sigma

(with digital servo)

Accuracy:

±0.25 µm (±10 micro-inches)

(with digital servo)

Orthogonality:

90°±1.0 arc-second

Stage Speed:

X: 160 mm/second

(6.2 inches/second)

Y: 120 mm/second

(4.5 inches/second)

(with digital servo)

Aperture Measurement Resolution:

0.01 µm

(0.4 micro-inches)

Minimum Programmable Aperture Increments:

0.001 µm

Aperture Range:

Minimum: 1.25 µm

Maximum: 3.8 mm

Aperture Accuracy:

0.3 µm

(over full 3.8 mm range)

Blade Orthogonality:

90°±0.05°

Blade Parallelism:

0°±0.75 arc-minute

Aperture Centering:

≤0.1 µm

(4 micro-inches)

Minimum Programmable Rotation Increment:

0.0001°

Rotation Accuracy:

0.005°

IMAGE REPEATER

pattern generator ILLUMINATOR

Camera Reduction Ratio:

10X ±0.005%

(14.5 mm camera)

Photographic Resolution:

1.25 µm minimum lines and spaces for 10X photoresist cameras with 14.5 mm image field diameter

Rotation:

0°±0.75 arc-minute

Wave Length:

G-Line, 436 nm ±10 nm

Uniformity:

±5%

(over the specified lens image field)

Lamp Type:

1000 W Mercury Arc

Reticle Change Precision:

±0.2 µm

Useable Plate Area:

To the edge of plate or specified stage travel, whichever is less

Inserts/Deletes:

Up to 300 per pass

Reticle Edge Masking:

0.15 to 0.393 inch

±0.002 inch at image plane

Wave Length:

H-Line, 405 nm ±10 nm

Uniformity:

≤5%

Intensity:

14.0 mW/cm2

Lamp Type:

500 W Mercury Arc

FOCUS

Repeatability:

±0.25 µm

Automatic Air Gauge

CRISS-CROSS

Station to Station Accuracy:

±0.25 µm