|
Laser
Resolution:
Lamda/128
0.005
µm
(with
digital servo)
Minimum
Programmable Stage Increments:
0.001
µm
(with
digital servo)
Travel:
152
mm x 203 mm standard
(6"
x 8")
Precision:
(Repeatability
over full stage travel)
0.2
µm at 3 sigma
(with
digital servo)
Accuracy:
±0.25
µm (±10 micro-inches)
(with
digital servo)
Orthogonality:
90°±1.0
arc-second
Stage
Speed:
X:
160 mm/second
(6.2
inches/second)
Y:
120 mm/second
(4.5
inches/second)
(with
digital servo) |
Camera
Reduction Ratio:
10X
±0.005%
(14.5
mm camera)
Photographic
Resolution:
1.25
µm minimum lines and spaces for 10X photoresist cameras with 14.5 mm
image field diameter
Rotation:
0°±0.75
arc-minute
Wave
Length:
G-Line,
436 nm ±10 nm
Uniformity:
±5%
(over
the specified lens image field)
Lamp
Type: 1000
W Mercury Arc
Reticle
Change Precision:
±0.2
µm
Useable
Plate Area:
To
the edge of plate or specified stage travel, whichever is less
Inserts/Deletes:
Up
to 300 per pass
Reticle
Edge Masking:
0.15
to 0.393 inch
±0.002
inch at image plane |
