X-Y STAGE

Aperture

(At Photo-graphic Plate)

Laser Resolution:

Lamda/128

0.005 µm

(with digital servo)

Minimum Programmable Stage Increments:

0.001 µm

(with digital servo)

Travel:

152 mm x 203 mm standard

(6" x 8")

Precision:

(Repeatability over full stage travel)

0.2 µm at 3 sigma

(with digital servo)

Accuracy:

±0.25 µm (±10 micro-inches)

(with digital servo)

Orthogonality:

90°±1.0 arc-second

Stage Speed:

X: 160 mm/second

(6.2 inches/second)

Y: 120 mm/second

(4.5 inches/second)

(with digital servo)

Aperture Measurement Resolution:

0.01 µm

(0.4 micro-inches)

Minimum Programmable Aperture Increments:

0.001 µm

Aperture Range:

Minimum: 1.25 µm

Maximum: 3.8 mm

Aperture Accuracy:

0.3 µm

(over full 3.8 mm range)

Blade Orthogonality:

90°±0.05°

Blade Parallelism:

0°±0.75 arc-minute

Aperture Centering:

≤0.1 µm

(4 micro-inches)

Minimum Programmable Rotation Increment:

0.0001°

Rotation Accuracy:

0.005°

ILLUMINATOR

FOCUS

Wave Length:

H-Line, 405 nm ±10 nm

Uniformity:

≤5%

Intensity:

14.0 mW/cm2

Lamp Type:

500 W Mercury Arc

Repeatability:

±0.25 µm

Automatic Air Gauge